MoS₂-Sb₂O₃ film exhibiting better oxidation-resistance in atomic oxygen environment

The microstructure and wear resistance of sputtered MoS₂ films can be improved by adding some amount of metals. However, the oxidation-resistance of MoS₂-metals films would be worried because some metals are sensitive to atomic oxygen (AO). In this paper, the inert Sb₂O₃ was introduced into the MoS₂ film, and its effect on the structure and anti-oxidation ability of the MoS₂ film was clarified. XRD and SEM results revealed that due to the addition of Sb₂O₃, the growth of MoS₂ micro-platelets was almost suppressed, and so the composite film was amorphous and very compact. XPS analysis indicated that for the composite film, the influence by the AO irradiation was restricted into the film surface layer. Namely, the composite film exhibited a better anti-oxidation ability in the AO environment.