Microstructure and properties of porous si3N4 Ceramics with a dense surface

Xiangming Li, Xiaowei Yin, Litong Zhang, Tianhao Pan

科研成果: 期刊稿件文章同行评审

35 引用 (Scopus)

摘要

Porous Si3N4 ceramics with a dense surface are fabricated by a joint process of pressureless sintering and chemical vapor deposition (CVD). Before CVD, the Si3N4 ceramic shows a uniform microstructure with well-distributed pores. During CVD, the depositions of Si3N4 in the inner surface and on the external surface of the ceramics lead to a decrease of porosities and pore sizes. As a result, both the flexural strength and fracture toughness of the Si3N 4 ceramic increase by >30%, the surface hardness increases more than five times, and the dielectric constant and loss increase slightly.

源语言英语
页(从-至)627-636
页数10
期刊International Journal of Applied Ceramic Technology
8
3
DOI
出版状态已出版 - 5月 2011

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