@inproceedings{26bda6ccb1924356a906389b903e8ed8,
title = "MEMS R&D trends",
abstract = "Micro-Electromechanical Systems (MEMS) has been regarded as one of the most promising technologies for the 21st Century. Recently, some highlight areas attract great attention including Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. The state of arts on MEMS research in China is briefly introduced and research activities in Northwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexible substrate for MEMS integration, micro mirror, micro battery and three dimension measurement are demonstrated.",
keywords = "Inertial MEMS, MEMS CAD, Optic MEMS, Power MEMS",
author = "Chengyu Jiang and Yang He and Weizheng Yuan",
year = "2006",
doi = "10.4028/0-87849-421-9.181",
language = "英语",
isbn = "0878494219",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "181--184",
editor = "Chengyu Jiang and Geng Liu and Dinghua Zhang and Xipeng Xu",
booktitle = "Advances in Materials Manufacturing Science and Technology II - Selected Papers from the 12th International Manufacturing Conference in China",
note = "12th International Manufacturing Conference in China, IMCC2006 ; Conference date: 21-09-2006 Through 23-09-2006",
}