TY - JOUR
T1 - Machine learning-enhanced on-chip micro-ring resonator platform for detection and recognition of low-concentration gas mixtures
AU - Qin, Peng
AU - Kang, Xin
AU - Gan, Xuetao
N1 - Publisher Copyright:
© 2025 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.
PY - 2025/6/16
Y1 - 2025/6/16
N2 - Micro-ring resonator (MRR) platforms based on silicon-on-insulator substrates have shown great potential for gas detection applications. However, challenges such as weak signal intensity and insufficient selectivity remain in the detection of low-concentration mixed gases. To overcome these limitations, this study proposes a machine learning-enhanced silicon nitride-based micro-ring resonator chip for the detection and recognition of methane (CH4), carbon dioxide (CO2), and hydrogen sulfide (H2S) gas mixtures. By combining micro-ring resonator sensing data with machine learning models, the detection performance of the optical waveguide sensor was substantially improved. Experimental results show that the sensing chip can accurately identify CH4, CO2, and H2S, with limits of detection (LODs) of 153 ppb, 184 ppb, and 83 ppb, respectively. With the aid of machine learning algorithms, the sensor achieves a classification accuracy of 91.4% in complex multi-component gas environments and can precisely determine methane concentration in unknown gas mixtures, with an average error of only 4.7%. This study not only provides an innovative solution for the detection of low-concentration gas mixtures but also demonstrates the broad application prospects of silicon photonics in the field of gas sensing.
AB - Micro-ring resonator (MRR) platforms based on silicon-on-insulator substrates have shown great potential for gas detection applications. However, challenges such as weak signal intensity and insufficient selectivity remain in the detection of low-concentration mixed gases. To overcome these limitations, this study proposes a machine learning-enhanced silicon nitride-based micro-ring resonator chip for the detection and recognition of methane (CH4), carbon dioxide (CO2), and hydrogen sulfide (H2S) gas mixtures. By combining micro-ring resonator sensing data with machine learning models, the detection performance of the optical waveguide sensor was substantially improved. Experimental results show that the sensing chip can accurately identify CH4, CO2, and H2S, with limits of detection (LODs) of 153 ppb, 184 ppb, and 83 ppb, respectively. With the aid of machine learning algorithms, the sensor achieves a classification accuracy of 91.4% in complex multi-component gas environments and can precisely determine methane concentration in unknown gas mixtures, with an average error of only 4.7%. This study not only provides an innovative solution for the detection of low-concentration gas mixtures but also demonstrates the broad application prospects of silicon photonics in the field of gas sensing.
UR - http://www.scopus.com/inward/record.url?scp=105007971876&partnerID=8YFLogxK
U2 - 10.1364/OE.563058
DO - 10.1364/OE.563058
M3 - 文章
AN - SCOPUS:105007971876
SN - 1094-4087
VL - 33
SP - 24844
EP - 24854
JO - Optics Express
JF - Optics Express
IS - 12
ER -