Low-loss tantalum pentoxide photonics based on Damascene process

Ruixuan Yi; Jinlong Lu; Xiaotong Zhang; Xuetao Gan

Low-loss tantalum pentoxide photonics based on Damascene process

Ruixuan Yi, Jinlong Lu, Xiaotong Zhang, Xuetao Gan

微电子学院

Northwestern Polytechnical University Xian

科研成果: 会议稿件 › 论文 › 同行评审

摘要

We demonstrate a low-loss Ta₂O₅ photonic platform using the Damascene process, presenting microring resonators with an intrinsic Q factor of 1.1 million and a waveguide propagation loss of 0.34 dB/cm.

源语言	英语
出版状态	已出版 - 2024
活动	2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, 韩国期限: 4 8月 2024 → 8 8月 2024

会议

会议	2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024
国家/地区	韩国
市	Incheon
时期	4/08/24 → 8/08/24

其它文件与链接

链接到 Scopus 的出版物

引用此

@conference{31ac61fc7f004a5ea24980d46822b849,

title = "Low-loss tantalum pentoxide photonics based on Damascene process",

abstract = "We demonstrate a low-loss Ta2O5 photonic platform using the Damascene process, presenting microring resonators with an intrinsic Q factor of 1.1 million and a waveguide propagation loss of 0.34 dB/cm.",

author = "Ruixuan Yi and Jinlong Lu and Xiaotong Zhang and Xuetao Gan",

note = "Publisher Copyright: {\textcopyright} 2024 The Author(s); 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 ; Conference date: 04-08-2024 Through 08-08-2024",

year = "2024",

language = "英语",

}

TY - CONF

T1 - Low-loss tantalum pentoxide photonics based on Damascene process

AU - Yi, Ruixuan

AU - Lu, Jinlong

AU - Zhang, Xiaotong

AU - Gan, Xuetao

PY - 2024

Y1 - 2024

N2 - We demonstrate a low-loss Ta2O5 photonic platform using the Damascene process, presenting microring resonators with an intrinsic Q factor of 1.1 million and a waveguide propagation loss of 0.34 dB/cm.

AB - We demonstrate a low-loss Ta2O5 photonic platform using the Damascene process, presenting microring resonators with an intrinsic Q factor of 1.1 million and a waveguide propagation loss of 0.34 dB/cm.

UR - http://www.scopus.com/inward/record.url?scp=85216230255&partnerID=8YFLogxK

M3 - 论文

AN - SCOPUS:85216230255

T2 - 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024

Y2 - 4 August 2024 through 8 August 2024

ER -

Low-loss tantalum pentoxide photonics based on Damascene process

摘要

会议

其它文件与链接

指纹

引用此