@inproceedings{493afab641d947728b8ec6d41103290c,
title = "Kinetic investigation on the deposition of SiC from methyltrichlorosilane and hydrogen",
abstract = "Kinetics of chemical vapor deposition of SiC from MTS/H2 was investigated by magnetic suspension balance in a wide range of processing conditions. The results show that the deposition rate exhibits three deposition behaviours depending on temperature: at lower temperatures (T<1000°C), the deposition rate increases slowly with increasing temperature. The apparent active energy is from 130 to 222kJ/mol; at mediate temperatures (from 1000 to 1100°C) , the deposition rate increases drastically and the apparent active energy is from 100 to 130kJ/mol. However, at higher temperatures (T>1300{"}C), it decreases quickly. The deposition rate first rises with both of pressure and flow rate and then almost keeps constant. The transformation point lies in 200sccm and from 2 to 3kPa, respectively. Residence time is seen to have a strong positive effect on the deposition rate. Longer residence time corresponding to temperature changing from 1000'C to 900°C causes a decrease by 24 times in the deposition rate.",
keywords = "CVD, Kinetic investigation, MTS, SiC",
author = "Cuiying Lu and Laifei Cheng and Chunnian Zhao and Litong Zhang and Fang Ye",
year = "2010",
doi = "10.1002/9780470640845.ch8",
language = "英语",
isbn = "9780470408421",
series = "Ceramic Transactions",
publisher = "American Ceramic Society",
pages = "55--62",
booktitle = "Ceramic Materials and Components for Energy and Environmental Applications - 9th Int. Symp. on Ceramic Materials for Energy and Environmental Applications and the 4th Laser Ceramics Symp.",
note = "Ceramic Materials and Components for Energy and Environmental Applications - 9th International Symposium on Ceramic Materials for Energy and Environmental Applications and the 4th Laser Ceramics Symposium ; Conference date: 10-11-2008 Through 14-11-2008",
}