摘要
An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 96-99 |
| 页数 | 4 |
| 期刊 | Yadian Yu Shengguang/Piezoelectrics and Acoustooptics |
| 卷 | 29 |
| 期 | 1 |
| 出版状态 | 已出版 - 2月 2007 |