Key algorithm for MEMS process geometrical simulation based on ACIS

Jing Hui Xu, Wei Zheng Yuan, Hong Long Chang, Jian Bing Xie

科研成果: 期刊稿件文章同行评审

摘要

An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now.

源语言英语
页(从-至)96-99
页数4
期刊Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
29
1
出版状态已出版 - 2月 2007

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