Ito Thin Film Resistance Temperature Detector with Al/Al2O3 Protective Coating for High-Temperature Application

Tao Zhang, Peng Pang, Yunzhe Liu, Jian Luo, Jinjun Deng, Xingxu Zhang, Binghe Ma

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Thin film resistance temperature detectors (TFRTDs) are ideal for in-situ temperature measurements due to their non-intrusiveness and quick thermal response. Indium tin oxide (ITO) is a promising material for TFRTDs used in harsh environments due to its high melting point and large temperature coefficient of resistance (TCR). However, the performance of ITO TFRTDs at elevated temperatures has attracted little attention and needs further investigation. In this paper, ITO TFRTDs were fabricated on Al2O3 substrates by using magnetron sputtering technology. Their key indicators, including TCR, repeatability, and thermal stability, were systematically investigated from room temperature to 1000°C. Results show that ITO TFRTDs possess a large TCR but poor repeatability and thermal stability. Herein, a novel Al/Al2O3 heterogeneous protective coating was employed to improve the high-temperature performance of the ITO TFRTDs. By using this method, the repeatability and resistance drift were successfully reduced by an order of magnitude: from 23.3% to 4.2% and from 0.015%/h to 0.0077%/h, respectively. The prior performance of the enhanced ITO TFRTDs makes them attractive for in-situ temperature measurement, especially in harsh environments.

源语言英语
主期刊名2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024
出版商Institute of Electrical and Electronics Engineers Inc.
ISBN(电子版)9798350359831
DOI
出版状态已出版 - 2024
活动19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024 - Kyoto, 日本
期限: 2 5月 20245 5月 2024

出版系列

姓名2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024

会议

会议19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024
国家/地区日本
Kyoto
时期2/05/245/05/24

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