TY - JOUR
T1 - Integrated behavior simulation and verification for a MEMS vibratory gyroscope using parametric model order reduction
AU - Chang, Honglong
AU - Zhang, Yafei
AU - Xie, Jianbing
AU - Zhou, Zhiguang
AU - Yuan, Weizheng
PY - 2010/4
Y1 - 2010/4
N2 - In this paper, a parameterized reduced model of a vibratory microelectromechanical systems (MEMS) gyroscope is established using a parametric model order reduction algorithm. In the reduction process, not only the input angular velocity, material density, Young's modulus, and Rayleigh damping coefficient but also the coefficient of thermal expansion and the change in temperature were all preserved. Based on this model, the integrated behavior simulation of the MEMS gyroscope, including many environmental factors in engineering situations, was performed in an accurate and fast way. Compared with the finite-element method, the relative error of the reduced-order model was less than 4.2%, while the computational efficiency was improved about five times. The cosimulation with a complete interface circuit was successfully performed in a very fast way, which provides a convenient platform for designers to evaluate the performance of sensors. The experimental verification proves that the reduced model can provide a reliable simulation result, although some errors exist.
AB - In this paper, a parameterized reduced model of a vibratory microelectromechanical systems (MEMS) gyroscope is established using a parametric model order reduction algorithm. In the reduction process, not only the input angular velocity, material density, Young's modulus, and Rayleigh damping coefficient but also the coefficient of thermal expansion and the change in temperature were all preserved. Based on this model, the integrated behavior simulation of the MEMS gyroscope, including many environmental factors in engineering situations, was performed in an accurate and fast way. Compared with the finite-element method, the relative error of the reduced-order model was less than 4.2%, while the computational efficiency was improved about five times. The cosimulation with a complete interface circuit was successfully performed in a very fast way, which provides a convenient platform for designers to evaluate the performance of sensors. The experimental verification proves that the reduced model can provide a reliable simulation result, although some errors exist.
KW - Behavior simulation
KW - Macromodel
KW - Microelectromechanical systems (MEMS)
KW - Parametric model order reduction (PMOR)
KW - Vibratory gyroscope
UR - http://www.scopus.com/inward/record.url?scp=77950596153&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2009.2038284
DO - 10.1109/JMEMS.2009.2038284
M3 - 文章
AN - SCOPUS:77950596153
SN - 1057-7157
VL - 19
SP - 282
EP - 293
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 2
M1 - 5393089
ER -