Influence of the arrangement of vacuum chuck holes on the transmittance wavefront of large-aperture KDP in single-point diamond turning

Xiang Yang Lei, Shuai Zhang, Sheng Fei Wang, Jian Feng Zhang, Wen Hu Su, Li Ping Zhang, Chen Hui An, Jian Wang, Qing Hua Zhang, Min Cai Liu, Qiao Xu

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6 引用 (Scopus)

摘要

Serious edge effects of potassium dihydrogen phosphate (KH2PO4, KDP) manufactured using single-point diamond turning (SPDT) often result in disqualification of the transmittance wavefront for high-power laser systems. In this paper, based on the theoretical analysis of sucker hole configuration and the pressure distribution law under the vacuum chuck condition of crystal elements, the influence of sucker hole configuration on the transmittance wavefront root-mean-square gradient (GRMS) is verified through fly-cutting experiments. By adopting the newly designed vacuum chuck, the vacuum-chucking quality is effectively improved, and the edge effect is accordingly suppressed in the SPDT. Moreover, the accuracy of the transmittance wavefront GRMS has an improvement of about 25% under the same processing parameters.

源语言英语
页(从-至)3619-3623
页数5
期刊Applied Optics
59
12
DOI
出版状态已出版 - 20 4月 2020
已对外发布

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