Indium-free Cu/fluorine doped ZnO composite transparent conductive electrodes with stretchable and flexible performance on poly(ethylene terephthalate) substrate

Material-abundant ZnO and metal thin film have been proposed as potential alternatives for the most widely commercial indium tin oxide (ITO) transparent and conductive electrode. Yet the deterioration of optical transparency and conductivity for these materials makes them difficult to compete with ITO. In this work, a double-layer structured film-composed of FZO and Cu film is presented at room temperature, which combines the high transparency of FZO and high conductivity of Cu film. We first studied the effect of oxygen pressure on the transparency and conductivity of free-standing FZO layer deposited on poly(ethylene terephthalate) (PET) by PLD method. Also the structural, electrical, and optical properties of bilayers electrode dependence on the Cu layer thickness were optimized in detail. As the Cu layer thickness increases, the resistivity decreases. The lowest resistivity of 6.6 × 10 ^-5 Ω cm with a carrier concentration of 1.11 × 10 ²² cm ^-3 and mobility of 8.52 cm ² V ^-1 s ^-1 was obtained at the optimum Cu (12 nm) layer thickness. We find that FZO layer have anti-reflection effect for Cu/FZO (250 nm) bilayer in the wavelength range of 650-1000 nm compared with single Cu layer. And we firstly study the stretchable performance for Cu film-based composite electrodes with stretching ratio changing from 0 to 5%. Furthermore, we study excellent mechanical flexibility and stability of composite electrodes by bending test.