@inproceedings{b9b650e8979541a1bf60adb7fa6917fc,
title = "Improving the Dynamic Range and Resolution of Mems Resonant Sensors Utilizing Nonlinear Cancellation",
abstract = "In this paper, improvements on the dynamic range and resolution of MEMS (Micro-electromechanical systems) resonant sensors are demonstrated using a nonlinear cancellation method. The fabricated MEMS resonator shows obvious mechanical nonlinear behavior due to spring hardening. A DC tuning voltage forces the device to enter an intermediate regime between the mechanical and electrostatic nonlinear regimes, resulting in a higher linear vibration amplitude compared to the maximum linear amplitude (MLA), i.e., critical amplitude. The experimental results show that the input referred resolution can be improved by a factor of 7 and the dynamic range is enhanced by 6 dB, respectively, when nonlinear cancellation is applied.",
keywords = "Dynamic range, Intermediate regime, Nonlinear behavior, Nonlinear cancellation, Resonant sensor",
author = "Chengxin Li and Aojie Quan and Hemin Zhang and Chen Wang and Torunbalci, {Mustafa Mert} and Linlin Wang and Chenxi Wang and Yangyang Guan and Yuan Wang and Michael Kraft",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "英语",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "469--472",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
}