Improvement of measurement accuracy in digital holographic microscopy by using dual-wavelength technique

Jianglei Di, Jiwei Zhang, Teli Xi, Chaojie Ma, Jianlin Zhao

科研成果: 期刊稿件文章同行评审

33 引用 (Scopus)

摘要

In traditional dual-wavelength digital holographic microscopy (DHM), a synthetic wavelength is obtained by using two lasers with different wavelengths, and the measurement range of the samples' step height can be expanded from nanometers to micrometers. However, the measurement accuracy reduces along with the expansion of the measuring range, and significant noise is simultaneously introduced in this process. For cases where the sample's step height is smaller than the wavelength of the illumination light, the measurement accuracy is very important. We present a new approach for dual-wavelength DHM. The synthetic wavelength is shorter than either of the two lasers, and thus higher measurement accuracy can be achieved. The numerical simulation and experiment results show the feasibility of this technique.

源语言英语
文章编号041313
期刊Journal of Micro/ Nanolithography, MEMS, and MOEMS
14
4
DOI
出版状态已出版 - 1 10月 2015

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