Improved design method for suppressing optical focal spots and experimental verification

Tao Liu, Jiaqi Hu, Tao He, Qiang Liu, Shanshan Chen, Shuming Yang, Guodong Zhang, Guanghua Cheng

科研成果: 期刊稿件文章同行评审

摘要

Pupil filtering is an effective method to modulate the 3D point spread function distribution of an optical system. Based on vector Debye-Wolf diffraction integral and a new fusion optimization algorithm, an improved method is described for efficiently designing the most widely-used concentric multi-belt pupil filters. The main advantage of this method is that it actively selects the minimum belt width and the total belt number for facilitating low-cost batch processing. Pupil filters for visible and near-infrared bands have been separately designed for improving the spatial resolution of optical imaging and ultrafast laser processing. The method has been experimentally demonstrated for suppressing the optical focal spot. The proposed method can be readily modified for designing more sophisticated multi-level pupil filters for practical applications in high-resolution imaging and fine laser micromachining.

源语言英语
页(从-至)399-405
页数7
期刊Journal of Modern Optics
70
7
DOI
出版状态已出版 - 2023

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