Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices

W. Li; Y. J. Guo; Q. B. Tang; X. T. Zu; J. Y. Ma; L. Wang; K. Tao; H. Torun; Y. Q. Fu

doi:10.1016/j.surfcoat.2019.02.041

Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices

W. Li, Y. J. Guo, Q. B. Tang, X. T. Zu, J. Y. Ma, L. Wang, K. Tao, H. Torun, Y. Q. Fu

机电学院

科研成果: 期刊稿件 › 文章 › 同行评审

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摘要

A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydrothermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 μW cm ⁻² , the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by ~200 Hz, mainly due to electroacoustic effect. The estimated enhancement in the sensitivity based on the experimental results is ~3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.

源语言	英语
页（从-至）	419-425
页数	7
期刊	Surface and Coatings Technology
卷	363
DOI	https://doi.org/10.1016/j.surfcoat.2019.02.041
出版状态	已出版 - 15 4月 2019

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title = "Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices",

abstract = " A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydrothermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 μW cm −2 , the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by ~200 Hz, mainly due to electroacoustic effect. The estimated enhancement in the sensitivity based on the experimental results is ~3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.",

keywords = "SAW device, ST-cut quartz, UV detector, ZnO nanorods",

author = "W. Li and Guo, {Y. J.} and Tang, {Q. B.} and Zu, {X. T.} and Ma, {J. Y.} and L. Wang and K. Tao and H. Torun and Fu, {Y. Q.}",

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year = "2019",

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day = "15",

doi = "10.1016/j.surfcoat.2019.02.041",

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T1 - Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices

AU - Li, W.

AU - Guo, Y. J.

AU - Tang, Q. B.

AU - Zu, X. T.

AU - Ma, J. Y.

AU - Wang, L.

AU - Tao, K.

AU - Torun, H.

AU - Fu, Y. Q.

PY - 2019/4/15

Y1 - 2019/4/15

N2 - A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydrothermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 μW cm −2 , the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by ~200 Hz, mainly due to electroacoustic effect. The estimated enhancement in the sensitivity based on the experimental results is ~3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.

AB - A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydrothermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 μW cm −2 , the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by ~200 Hz, mainly due to electroacoustic effect. The estimated enhancement in the sensitivity based on the experimental results is ~3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.

KW - SAW device

KW - ST-cut quartz

KW - UV detector

KW - ZnO nanorods

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U2 - 10.1016/j.surfcoat.2019.02.041

DO - 10.1016/j.surfcoat.2019.02.041

M3 - 文章

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SN - 0257-8972

VL - 363

SP - 419

EP - 425

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices

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