High-performance humidity sensor based on a polyvinyl alcohol-coated photonic crystal cavity

Chenyang Zhao, Qingchen Yuan, Liang Fang, Xuetao Gan, Jianlin Zhao

科研成果: 期刊稿件文章同行评审

44 引用 (Scopus)

摘要

We demonstrate a high-performance relative humidity (RH) sensor by coating a photonic crystal (PC) cavity with polyvinyl alcohol (PVA). Because a PC cavity's evanescent field strongly interacts with the coated moisture-sensitive PVA film, the resonant wavelength is modified remarkably under varying RH levels ranging from 30% to 90%. In a PC cavity coated with a 720 nm thick PVA, the sensor exhibits a linear spectrum sensitivity exceeding 129 pm/%RH over 40-90% RH, and the power interrogation presents a high sensitivity as 0.77 dB/%RH. The resolvable humidity variation could be much less than 0.1%RH. Relying on the sub-micron thick PVA, the sensor promises a response time less than 300 ms and good repeatability. The dependence of the sensor performances on the PVA thickness is studied as well, indicating a tradeoff between the sensing dynamic range and the response time.

源语言英语
页(从-至)5515-5518
页数4
期刊Optics Letters
41
23
DOI
出版状态已出版 - 1 12月 2016

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