Fully flexible hot film sensor array for underwater applications

Jinzhong Ren, Binghe Ma, Jinjun Deng, Weizheng Yuan

科研成果: 书/报告/会议事项章节会议稿件同行评审

4 引用 (Scopus)

摘要

Flexible hot film sensor array was developed for underwater applications. To minimize conductive heat loss to substrate, heighten sensitivity and shorten response time nickel thin film resistors are fabricated on polyimide substrate. Fully flexible structure and very low thickness of the sensing belt enable it possible to be taped on highly curved surfaces to measure fluid parameters with minimal invasion. Polymer compatible micromachining technologies with further consideration of waterproof coating were developed. High temperature coefficient of resistance (TCR) and low time constant of sensor were obtained. A hydrodynamic experimental setup was established, and a demonstration indicated flow velocity can be measured with the sensor.

源语言英语
主期刊名2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
173-176
页数4
DOI
出版状态已出版 - 2010
活动5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, 中国
期限: 20 1月 201023 1月 2010

出版系列

姓名2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

会议

会议5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
国家/地区中国
Xiamen
时期20/01/1023/01/10

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