Femtosecond multi-beam interference lithography based on dynamic wavefront engineering

Qiang Zhou, Wenzheng Yang, Fengtao He, Razvan Stoian, Rongqing Hui, Guanghua Cheng

科研成果: 期刊稿件文章同行评审

20 引用 (Scopus)

摘要

A method for precise multi-spot parallel ultrafast laser material structuring is presented based on multi-beam interference generated by dynamic spatial phase engineering. A Spatial Light Modulator (SLM) and digitally programming of phase masks are used to accomplish the function of a multi-facet pyramid lens, so that the laser beam can be spatially modulated to create beam multiplexing and desired two-dimensional (2D) multi-beam interference patterns. Various periodic microstructures on metallic alloy surfaces are fabricated with this technique. A method of preparing extended scale periodic microstructures by loading dynamic time-varying phases is also demonstrated. Scanning electron microscopy (SEM) reveals the period and morphology of the microstructures created using this technique. The asymmetry of interference modes generated from the beams with asymmetric wave vector distributions is equally explored. The flexibility of programming the period of the microstructures is demonstrated.

源语言英语
页(从-至)9851-9861
页数11
期刊Optics Express
21
8
DOI
出版状态已出版 - 22 4月 2013
已对外发布

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