TY - JOUR
T1 - Development and application of high-end aerospace MEMS
AU - Yuan, Weizheng
N1 - Publisher Copyright:
© 2017, Higher Education Press and Springer-Verlag Berlin Heidelberg.
PY - 2017/12/1
Y1 - 2017/12/1
N2 - This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.
AB - This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.
KW - aeronautic and aerospace
KW - design and manufacture technology
KW - MEMS
UR - http://www.scopus.com/inward/record.url?scp=85015902800&partnerID=8YFLogxK
U2 - 10.1007/s11465-017-0424-3
DO - 10.1007/s11465-017-0424-3
M3 - 文献综述
AN - SCOPUS:85015902800
SN - 2095-0233
VL - 12
SP - 567
EP - 573
JO - Frontiers of Mechanical Engineering
JF - Frontiers of Mechanical Engineering
IS - 4
ER -