Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability

Xiaoyu Su, Zhongjing Ren, Quan Pan, Ming Lu, Fernando Camino, Yong Shi

科研成果: 期刊稿件文章同行评审

6 引用 (Scopus)

摘要

The structure design of micro cantilever beams(MCBs), which has a significant effect on MCBs' controllable actuation range, is usually restricted by the establishment of the inner electric circuit. This paper proposes the design of a micro electro-controllable twisting cantilever beam (METCB). The architecture and the fabrication diagram of the proposed METCB are presented before its features are theoretically and experimentally validated. In detail, the analytical validation includes a sequence of two models: electro-thermal and thermo-mechanical. Through these two models, the thermal distribution along the METCB and the deformation brought by the thermal distribution are investigated, respectively. On the basis of the design and equations, the METCB samples have been manufactured using a planar deposition technique with an e-beam evaporator. Two in-site experiments are then conducted to sequentially figure out the upper voltage limit of the inner electric circuit and the maximum temperature limit of the METCB. Finally, another experiment is carried out to explore the relation between the applied voltage and the relative twisting angle of the METCB sample. The theoretical prediction and the observed experiment result both prove the feasibility of the proposed METCB and its electro-controllable twisting ability.

源语言英语
文章编号065010
期刊Journal of Micromechanics and Microengineering
31
6
DOI
出版状态已出版 - 6月 2021

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