摘要
The (CrAlTiNbV)Nx coatings are fabricated by controlling the substrate bias via magnetron sputtering method. Under low substrate bias, the coating tends to form a loose columnar crystal structure with (200) preferred orientation. However, when the substrate bias increases, the coating transforms into a dense nanocrystalline structure, and the (111) orientation is enhanced. As the substrate bias increases, the residual stress and hardness of the coating gradually increase, while the adhesion strength decreases slightly. Friction tests show that the coating possesses the lowest average friction coefficient (about 0.06) and wear rate (8.7 × 10-9 mm3/N·m) in 4050# aviation lubricant, which is achieved under the substrate bias of -96 V and -126 V, respectively.
源语言 | 英语 |
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页(从-至) | 27342-27350 |
页数 | 9 |
期刊 | Ceramics International |
卷 | 47 |
期 | 19 |
DOI | |
出版状态 | 已出版 - 1 10月 2021 |
已对外发布 | 是 |