@inproceedings{8a23e9ac61494576b1723e78a5d060fc,
title = "Application of laser doppler technique in detecting the dynamic parameter of MEMS device",
abstract = "In order to test the dynamic performance of MEMS devices accurately, the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror. The measuring formulas of the object motion velocity and displacement were derived. A kind of MEMS scanning mirror was tested using the established optical testing system. The measurement results show that the resonance frequency characteristic and the transient response characteristic is 269Hz and 60ms respectively which are consistent with the theoretical analysis. The method has significant reference value to the application of the laser Doppler technique.",
keywords = "Frequency characteristics, Laser doppler, MEMS scanning mirror, Testing",
author = "Yuan, {Guang Min} and Weizheng Yuan and Liu, {Yao Bo} and Chang, {Hong Long}",
year = "2013",
doi = "10.4028/www.scientific.net/KEM.562-565.1083",
language = "英语",
isbn = "9783037857397",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "1083--1087",
booktitle = "Micro-Nano Technology XIV",
note = "14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012 ; Conference date: 04-11-2012 Through 07-11-2012",
}