Analysis and characterization of amorphous boron carbide coatings deposited from BCI3-CH4-H2 mixtures

科研成果: 书/报告/会议事项章节章节同行评审

摘要

Amorphous boron carbide was prepared by chemical vapor deposition from BCI3-CH4-H2 system. The deposits were characterized by SEM, EDS, XRD, FTIR, Raman, and XPS. The results showed that deposition indicate cauliflower-like surface and glass-like cross-sectional morphologies. The boron concentration is 42.83at%, corresponding with 56.32at% carbon and 0.75af% oxygen by EDS. The XRD was not suitable to characterize amorphous boron carbide. B-C bond state was demonstrated by Raman, FTTR and XPS spectrum. Amorphous structure was demonstrated by TEM. The formation of intermediate reactant, BxCyHzCl was very important for the deposition of amorphous boron carbide.

源语言英语
主期刊名High Temperature Ceramic Matrix Composites 8
出版商wiley
345-355
页数11
ISBN(电子版)9781118932995
ISBN(印刷版)9781118932988
DOI
出版状态已出版 - 1 1月 2014

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