TY - CHAP
T1 - Analysis and characterization of amorphous boron carbide coatings deposited from BCI3-CH4-H2 mixtures
AU - Liu, Yongsheng
AU - Chai, Nan
AU - Zhang, Litong
AU - Cheng, Laifei
N1 - Publisher Copyright:
© 2014 by The American Ceramic Society. All rights reserved.
PY - 2014/1/1
Y1 - 2014/1/1
N2 - Amorphous boron carbide was prepared by chemical vapor deposition from BCI3-CH4-H2 system. The deposits were characterized by SEM, EDS, XRD, FTIR, Raman, and XPS. The results showed that deposition indicate cauliflower-like surface and glass-like cross-sectional morphologies. The boron concentration is 42.83at%, corresponding with 56.32at% carbon and 0.75af% oxygen by EDS. The XRD was not suitable to characterize amorphous boron carbide. B-C bond state was demonstrated by Raman, FTTR and XPS spectrum. Amorphous structure was demonstrated by TEM. The formation of intermediate reactant, BxCyHzCl was very important for the deposition of amorphous boron carbide.
AB - Amorphous boron carbide was prepared by chemical vapor deposition from BCI3-CH4-H2 system. The deposits were characterized by SEM, EDS, XRD, FTIR, Raman, and XPS. The results showed that deposition indicate cauliflower-like surface and glass-like cross-sectional morphologies. The boron concentration is 42.83at%, corresponding with 56.32at% carbon and 0.75af% oxygen by EDS. The XRD was not suitable to characterize amorphous boron carbide. B-C bond state was demonstrated by Raman, FTTR and XPS spectrum. Amorphous structure was demonstrated by TEM. The formation of intermediate reactant, BxCyHzCl was very important for the deposition of amorphous boron carbide.
KW - Boron carbide coatings
KW - Chemical vapor deposition
KW - Kinetic modeling
KW - Mass transfer
KW - Silicon carbide
UR - http://www.scopus.com/inward/record.url?scp=85101892086&partnerID=8YFLogxK
U2 - 10.1002/9781118932995.ch37
DO - 10.1002/9781118932995.ch37
M3 - 章节
AN - SCOPUS:85101892086
SN - 9781118932988
SP - 345
EP - 355
BT - High Temperature Ceramic Matrix Composites 8
PB - wiley
ER -