A virtual gyroscope based-on a single-chip four-microgyroscope array

Qiang Shen, Weizheng Yuan, Beini Qu, Jianbin Xie, Honglong Chang

科研成果: 书/报告/会议事项章节会议稿件同行评审

9 引用 (Scopus)

摘要

This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.

源语言英语
主期刊名9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
出版商Institute of Electrical and Electronics Engineers Inc.
195-198
页数4
ISBN(电子版)9781479947270
DOI
出版状态已出版 - 23 9月 2014
活动9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 - Waikiki Beach, 美国
期限: 13 4月 201416 4月 2014

出版系列

姓名9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

会议

会议9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
国家/地区美国
Waikiki Beach
时期13/04/1416/04/14

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