A virtual gyroscope based-on a single-chip four-microgyroscope array

Qiang Shen; Weizheng Yuan; Beini Qu; Jianbin Xie; Honglong Chang

doi:10.1109/NEMS.2014.6908789

A virtual gyroscope based-on a single-chip four-microgyroscope array

Qiang Shen, Weizheng Yuan, Beini Qu, Jianbin Xie, Honglong Chang

机电学院

Northwestern Polytechnical University Xian

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

9 引用（Scopus）

摘要

This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.

源语言	英语
主期刊名	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
出版商	Institute of Electrical and Electronics Engineers Inc.
页	195-198
页数	4
ISBN（电子版）	9781479947270
DOI	https://doi.org/10.1109/NEMS.2014.6908789
出版状态	已出版 - 23 9月 2014
活动	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 - Waikiki Beach, 美国期限: 13 4月 2014 → 16 4月 2014

出版系列

姓名	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

会议

会议	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
国家/地区	美国
市	Waikiki Beach
时期	13/04/14 → 16/04/14

访问文件

10.1109/NEMS.2014.6908789

其它文件与链接

链接到 Scopus 的出版物

引用此

Shen, Q., Yuan, W., Qu, B., Xie, J., & Chang, H. (2014). A virtual gyroscope based-on a single-chip four-microgyroscope array. 在 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 (页码 195-198). 文章 6908789 (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2014.6908789

Shen, Qiang ; Yuan, Weizheng ; Qu, Beini 等. / A virtual gyroscope based-on a single-chip four-microgyroscope array. 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014. Institute of Electrical and Electronics Engineers Inc., 2014. 页码 195-198 (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014).

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title = "A virtual gyroscope based-on a single-chip four-microgyroscope array",

abstract = "This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.",

keywords = "Four-microgyroscope array, Single chip, Virtual gyroscope",

author = "Qiang Shen and Weizheng Yuan and Beini Qu and Jianbin Xie and Honglong Chang",

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Shen, Q, Yuan, W, Qu, B, Xie, J & Chang, H 2014, A virtual gyroscope based-on a single-chip four-microgyroscope array. 在 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014., 6908789, 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014, Institute of Electrical and Electronics Engineers Inc., 页码 195-198, 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014, Waikiki Beach, 美国, 13/04/14. https://doi.org/10.1109/NEMS.2014.6908789

A virtual gyroscope based-on a single-chip four-microgyroscope array. / Shen, Qiang; Yuan, Weizheng; Qu, Beini 等.
9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014. Institute of Electrical and Electronics Engineers Inc., 2014. 页码 195-198 6908789 (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A virtual gyroscope based-on a single-chip four-microgyroscope array

AU - Shen, Qiang

AU - Yuan, Weizheng

AU - Qu, Beini

AU - Xie, Jianbin

AU - Chang, Honglong

PY - 2014/9/23

Y1 - 2014/9/23

N2 - This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.

AB - This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.

KW - Four-microgyroscope array

KW - Single chip

KW - Virtual gyroscope

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DO - 10.1109/NEMS.2014.6908789

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T3 - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

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BT - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Y2 - 13 April 2014 through 16 April 2014

ER -

Shen Q, Yuan W, Qu B, Xie J, Chang H. A virtual gyroscope based-on a single-chip four-microgyroscope array. 在 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014. Institute of Electrical and Electronics Engineers Inc. 2014. 页码 195-198. 6908789. (9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014). doi: 10.1109/NEMS.2014.6908789

A virtual gyroscope based-on a single-chip four-microgyroscope array

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