TY - GEN
T1 - A virtual gyroscope based-on a single-chip four-microgyroscope array
AU - Shen, Qiang
AU - Yuan, Weizheng
AU - Qu, Beini
AU - Xie, Jianbin
AU - Chang, Honglong
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014/9/23
Y1 - 2014/9/23
N2 - This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.
AB - This paper establishes a virtual gyroscope based on a single-chip four-microgyroscope array. The four gyroscope array is integrated to a small area on a single chip by a silicon-on-insulator (SOI) process. As far as we know, this is the first reported virtual gyroscope system based on a single-chip gyroscope array. Test results show that scale factor of four single gyroscopes are 6.9mV/deg/s, 7.5mV/deg/s, 8.1mV/deg/s and 10.2mV/deg/s, respectively. The bias stability of the virtual gyroscope I maximumly improved from 0.042deg/s to 0.013deg/s, which is a 3.2 times improvement.
KW - Four-microgyroscope array
KW - Single chip
KW - Virtual gyroscope
UR - http://www.scopus.com/inward/record.url?scp=84908616896&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2014.6908789
DO - 10.1109/NEMS.2014.6908789
M3 - 会议稿件
AN - SCOPUS:84908616896
T3 - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
SP - 195
EP - 198
BT - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
Y2 - 13 April 2014 through 16 April 2014
ER -