@inproceedings{facdb2347d2d41feb5df9e57a24a21b1,
title = "A Silicon Recording Probe with Integrated Ag/Agcl Reference Electrode for In-Situ PH Sensing",
abstract = "This paper presents a silicon recording probe with integrated in-situ Ag/AgCl reference electrode (ISA/ARE) for simultaneous pH sensing and electrophysiology recordings for the application neuroscience. The preparation of in-situ silver layer and its chlorination are realized by a constant current electrochemical plating method. The repeatable Ag/AgCl layer with stable potential has been verified by X-ray diffraction and electrochemical measurements. Meanwhile, the pH sensitivity of the combination of Iridium oxide (IrOx) electrodes and ISA/ARE is 54.7mV/pH. The area of ISA/ARE is only 7000m2, which is highly compatible with the preparation process of silicon probes, and is suitable for integration into the front of micro shanks as an in-situ detection reference. In short, the unique fabrication method to realize miniaturized and integrated in-situ reference electrode is of great significance to biosensors.",
keywords = "Ag/AgCl, In-situ reference electrode, Neural probe, pH sensing",
author = "Longchun Wang and Zhejun Guo and Bowen Ji and Ye Xi and Bin Yang and Jingquan Liu",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 ; Conference date: 20-06-2021 Through 25-06-2021",
year = "2021",
month = jun,
day = "20",
doi = "10.1109/Transducers50396.2021.9495445",
language = "英语",
series = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1412--1415",
booktitle = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",
}