A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting

K. Tao, S. W. Lye, N. Wang, X. Hu, J. M. Miao

科研成果: 书/报告/会议事项章节会议稿件同行评审

4 引用 (Scopus)

摘要

This paper presents the design, modeling and characterization of a compact MEMS electret power generator for multi-directional vibration energy harvesting. The device is built on a symmetrical square-shape resonator that could harvest kinetic energy from multiple directions by using two orthogonal vibration degrees of freedom. Sandwich structure is adopted not only to enhance the output performance, but also to reduce both vertical pull-in and horizontal electrostatic damping force with two separate 180° out-of-phase capacitive circuit. The generator can be a potential candidate towards a practical multi-directional energy harvesting device for low-level ambient vibrational energy harvesting.

源语言英语
主期刊名2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
出版商Institute of Electrical and Electronics Engineers Inc.
51-54
页数4
ISBN(电子版)9781479989553
DOI
出版状态已出版 - 5 8月 2015
已对外发布
活动18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, 美国
期限: 21 6月 201525 6月 2015

出版系列

姓名2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

会议

会议18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
国家/地区美国
Anchorage
时期21/06/1525/06/15

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