A novel transfer method from 3D model to 2D mask layout

Jing Hui Xu, Wei Zheng Yuan, Hong Long Chang, Jian Bing Xie

科研成果: 期刊稿件文章同行评审

1 引用 (Scopus)

摘要

Based on the study of the format of a sub-standard 3D solid model file(SAT format), we presented a transfer method for the 3D solid models to standard CAD-layouts. The corresponding transfer interface was developed in VC++ language. The validity of the transfer method was validated by using a kind of typical MEMS device-micro-machined accelerometer. The result showed that the transfer method is feasible.

源语言英语
页(从-至)1333-1336
页数4
期刊Chinese Journal of Sensors and Actuators
19
5
出版状态已出版 - 10月 2006

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