A multivariate process capability index with a spatial coefficient

Shaoxi Wang; Mingxin Wang; Xiaoya Fan; Shengbing Zhang; Ru Han

doi:10.1088/1674-4926/34/2/026001

A multivariate process capability index with a spatial coefficient

Shaoxi Wang, Mingxin Wang, Xiaoya Fan, Shengbing Zhang, Ru Han

微电子学院

Northwestern Polytechnical University Xian

科研成果: 期刊稿件 › 文章 › 同行评审

5 引用（Scopus）

摘要

After analyzing the multivariate Cpm method (Chan et al. 1991), this paper presents a spatial multivariate process capability index (PCI) method, which can solve a multivariate off-centered case and may provide references for assuring and improving process quality level while achieving an overall evaluation of process quality. Examples for calculating multivariate PCI are given and the experimental results show that the systematic method presented is effective and actual.

源语言	英语
文章编号	026001
期刊	Journal of Semiconductors
卷	34
期	2
DOI	https://doi.org/10.1088/1674-4926/34/2/026001
出版状态	已出版 - 2月 2013

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10.1088/1674-4926/34/2/026001

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A multivariate process capability index with a spatial coefficient

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