TY - JOUR
T1 - A mode-localized DC electric field sensor
AU - Hao, Yongcun
AU - Wang, Chenggang
AU - Sun, Zheng
AU - Zhang, Zhao
AU - Guo, Jin
AU - Chang, Honglong
N1 - Publisher Copyright:
© 2021 Elsevier B.V.
PY - 2022/1/1
Y1 - 2022/1/1
N2 - This paper reports a DC electric field sensor (EFS) based on the mode localization phenomenon. The EFS consists of 3-degrees-of-freedom weakly coupled resonators (WCRs) and two capacitor arrays that are electrostatically coupled with the WCRs. The capacitor arrays sense the electric field and produce a stiffness perturbation that causes an amplitude ratio change of the WCRs. The EFS is fabricated using a silicon-on-insulator process and evaluated in a vacuum chamber. The amplitude ratio of the resonators changes from 2.2 to 7.5 as the electric field strength ranges from 0 to 7 kV/m, with a sensitivity of 0.76 /(kV/m). The noise, resolution, and stability of the mode-localized EFS are 11.5 (V/m)/√Hz, 22.9 V/m, and 9.1 V/m, respectively, which are competitive compared with that of other high-performance micromachined EFS.
AB - This paper reports a DC electric field sensor (EFS) based on the mode localization phenomenon. The EFS consists of 3-degrees-of-freedom weakly coupled resonators (WCRs) and two capacitor arrays that are electrostatically coupled with the WCRs. The capacitor arrays sense the electric field and produce a stiffness perturbation that causes an amplitude ratio change of the WCRs. The EFS is fabricated using a silicon-on-insulator process and evaluated in a vacuum chamber. The amplitude ratio of the resonators changes from 2.2 to 7.5 as the electric field strength ranges from 0 to 7 kV/m, with a sensitivity of 0.76 /(kV/m). The noise, resolution, and stability of the mode-localized EFS are 11.5 (V/m)/√Hz, 22.9 V/m, and 9.1 V/m, respectively, which are competitive compared with that of other high-performance micromachined EFS.
KW - Amplitude ratio
KW - Electric field sensor
KW - Mode localization
KW - Weakly coupled resonators
UR - http://www.scopus.com/inward/record.url?scp=85121000175&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2021.113244
DO - 10.1016/j.sna.2021.113244
M3 - 文章
AN - SCOPUS:85121000175
SN - 0924-4247
VL - 333
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
M1 - 113244
ER -