A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow

Bin Nie; Weimin Wang; Fang Ye; Honglong Chang

doi:10.1109/MEMSYS.2017.7863603

A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow

Bin Nie, Weimin Wang, Fang Ye, Honglong Chang

Northwestern Polytechnical University Xian

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

13 引用（Scopus）

摘要

This paper reports a novel micromachined three-axis gas inertial sensor based on the bidirectional thermal expansion flow. Eight heaters and eight thermistors form a 'cross-shape' network to generate bidirectional thermal expansion flows for the thermos-resistive sensing of each thermistor. Thus, the Z-axis angular rate and X/Y-axis acceleration can be sensed simultaneously with a sensitivity of 1.370mV/°/s within the range of [-3240°/s, +3240°/s], 2.183V/g and 1.916V/g within the range of [-1g, +1g], respectively. The couplings between X/Y acceleration measurements have decreased to 0.678% and 2.924% respectively.

源语言	英语
主期刊名	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
出版商	Institute of Electrical and Electronics Engineers Inc.
页	1091-1094
页数	4
ISBN（电子版）	9781509050789
DOI	https://doi.org/10.1109/MEMSYS.2017.7863603
出版状态	已出版 - 23 2月 2017
活动	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, 美国期限: 22 1月 2017 → 26 1月 2017

出版系列

姓名	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN（印刷版）	1084-6999

会议

会议	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
国家/地区	美国
市	Las Vegas
时期	22/01/17 → 26/01/17

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10.1109/MEMSYS.2017.7863603

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引用此

Nie, B., Wang, W., Ye, F., & Chang, H. (2017). A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow. 在 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (页码 1091-1094). 文章 7863603 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863603

Nie, Bin ; Wang, Weimin ; Ye, Fang 等. / A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. 页码 1091-1094 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{a57e0fe8ab91476396aa75f80ef7e488,

title = "A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow",

abstract = "This paper reports a novel micromachined three-axis gas inertial sensor based on the bidirectional thermal expansion flow. Eight heaters and eight thermistors form a 'cross-shape' network to generate bidirectional thermal expansion flows for the thermos-resistive sensing of each thermistor. Thus, the Z-axis angular rate and X/Y-axis acceleration can be sensed simultaneously with a sensitivity of 1.370mV/°/s within the range of [-3240°/s, +3240°/s], 2.183V/g and 1.916V/g within the range of [-1g, +1g], respectively. The couplings between X/Y acceleration measurements have decreased to 0.678% and 2.924% respectively.",

author = "Bin Nie and Weimin Wang and Fang Ye and Honglong Chang",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

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doi = "10.1109/MEMSYS.2017.7863603",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Nie, B, Wang, W, Ye, F & Chang, H 2017, A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow. 在 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863603, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., 页码 1091-1094, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, 美国, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863603

A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow. / Nie, Bin; Wang, Weimin; Ye, Fang 等.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. 页码 1091-1094 7863603 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow

AU - Nie, Bin

AU - Wang, Weimin

AU - Ye, Fang

AU - Chang, Honglong

PY - 2017/2/23

Y1 - 2017/2/23

N2 - This paper reports a novel micromachined three-axis gas inertial sensor based on the bidirectional thermal expansion flow. Eight heaters and eight thermistors form a 'cross-shape' network to generate bidirectional thermal expansion flows for the thermos-resistive sensing of each thermistor. Thus, the Z-axis angular rate and X/Y-axis acceleration can be sensed simultaneously with a sensitivity of 1.370mV/°/s within the range of [-3240°/s, +3240°/s], 2.183V/g and 1.916V/g within the range of [-1g, +1g], respectively. The couplings between X/Y acceleration measurements have decreased to 0.678% and 2.924% respectively.

AB - This paper reports a novel micromachined three-axis gas inertial sensor based on the bidirectional thermal expansion flow. Eight heaters and eight thermistors form a 'cross-shape' network to generate bidirectional thermal expansion flows for the thermos-resistive sensing of each thermistor. Thus, the Z-axis angular rate and X/Y-axis acceleration can be sensed simultaneously with a sensitivity of 1.370mV/°/s within the range of [-3240°/s, +3240°/s], 2.183V/g and 1.916V/g within the range of [-1g, +1g], respectively. The couplings between X/Y acceleration measurements have decreased to 0.678% and 2.924% respectively.

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U2 - 10.1109/MEMSYS.2017.7863603

DO - 10.1109/MEMSYS.2017.7863603

M3 - 会议稿件

AN - SCOPUS:85015796923

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1091

EP - 1094

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

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Nie B, Wang W, Ye F , Chang H. A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow. 在 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. 页码 1091-1094. 7863603. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863603

A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow

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