A continuously tunable size-based filter

H. L. Chang, F. L. Chen, F. Ye, S. J. Hong, W. Z. Yuan, Y. C. Tai

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

In this paper we present a MEMS filter with continuously tunable pore size using a mirosieve-couple structure. The shape of the pore can be rectangular or square, while the size of the pore can be continuously tuned from a few microns to 200 microns dynamically. As far as we know, this is the largest tunable range among all the reported cell or microparticle sorters. The functionality of the tunable pore filter is validated using microbeads.

源语言英语
主期刊名2013 Transducers and Eurosensors XXVII
主期刊副标题The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
出版商IEEE Computer Society
2082-2085
页数4
ISBN(印刷版)9781467359818
DOI
出版状态已出版 - 1 6月 2013
活动2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, 西班牙
期限: 16 6月 201320 6月 2013

出版系列

姓名2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

会议

会议2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
国家/地区西班牙
Barcelona
时期16/06/1320/06/13

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