A 2DOF MEMS Vibrational Energy Harvester

K. Tao, L. H. Tang, J. Wu, J. M. Miao

科研成果: 书/报告/会议事项章节会议稿件同行评审

2 引用 (Scopus)

摘要

In this paper, a novel two-degree-of-freedom (2DOF) MEMS electromagnetic vibration energy harvesting system is proposed. The dual-mass resonant structure that comprises of a primary mass and an accessory mass is structured on silicon-on-insulator (SOI) wafer by double-sided deep reactive-ion etching (DRIE). Unlike previous 2DOF harvesters, the induction coil is only patterned on the primary mass for energy conversion. By carefully adjusting the weight of accessory mass, the first two resonances of the primary mass can be tuned close to each other while maintain comparable magnitudes. Therefore, both resonances could contribute to energy harvesting that make the system more efficient and adaptive in frequency-variant vibrational circumstances. With the current prototype, two close resonances with a frequency ratio of only 1.19 and comparable peaks are achieved, providing good validation for the modeling results.

源语言英语
主期刊名2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018
出版商Institute of Electrical and Electronics Engineers Inc.
9-10
页数2
ISBN(印刷版)9781538642504
DOI
出版状态已出版 - 20 8月 2018
活动8th IEEE International Nanoelectronics Conferences, INEC 2018 - Kuala Lumpur, 马来西亚
期限: 3 1月 20185 1月 2018

出版系列

姓名2018 IEEE 8th International Nanoelectronics Conferences, INEC 2018

会议

会议8th IEEE International Nanoelectronics Conferences, INEC 2018
国家/地区马来西亚
Kuala Lumpur
时期3/01/185/01/18

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