Ultra-Soft Neural Probe with a Temporary High-Strength U-Section Coating by Picosecond Laser Micromachining

Xiaoli You, Fanqi Sun, Yuhao Zhou, Minghao Wang, Mengfei Xu, Xichen Yuan, Honglong Chang, Jingquan Liu, Bowen Ji

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

This paper reports an ultra-soft neural probe with a temporary high-strength U-section coating of polyethylene glycol (PEG) for the first time. Its fabrication is compatible with MEMS processes, and an ultrathin U-section coating over the probe's back and sidewall is precisely formed by spinning and cold laser cutting. With this novel coating, the probe has both minimized cross-sectional area and sufficient mechanical strength for low-invasive penetration into the brain. Besides, the remained ultra-soft deformable probe after PEG dissolution is expected to be the next generation of neural implants for chronic recording.

Original languageEnglish
Pages (from-to)762-766
Number of pages5
JournalIEEJ Transactions on Electrical and Electronic Engineering
Volume19
Issue number5
DOIs
StatePublished - May 2024

Keywords

  • picosecond laser cutting
  • U-section coating
  • ultra-soft neural probe

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