TY - JOUR
T1 - Ultra-precision grinding of monocrystalline silicon cylindrical mirror
AU - Li, Jie
AU - Zhou, Lian
AU - Ma, Houcai
AU - Zhang, Qinghua
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2023
Y1 - 2023
N2 - As one of the important functional components in the optical diagnosis system, the processing accuracy of monocrystalline silicon cylindrical mirror directly affects the overall performance of the entire experimental device. In order to obtain high-precision monocrystalline silicon cylindrical optical elements, the coordinate transfer function models of the diamond wheel in the cylindrical surface parallel grinding process were established, and the forming process scheme was proposed based on the wheel dressing precision and element grinding precision. At the end, the experiment for a monocrystalline silicon cylindrical mirror with size of 440mm × 50mm was carried out. The PV value of form error after grinding was about 2.7μm, which proved the correctness of the transfer function and the forming process scheme of monocrystalline silicon cylindrical optical element.
AB - As one of the important functional components in the optical diagnosis system, the processing accuracy of monocrystalline silicon cylindrical mirror directly affects the overall performance of the entire experimental device. In order to obtain high-precision monocrystalline silicon cylindrical optical elements, the coordinate transfer function models of the diamond wheel in the cylindrical surface parallel grinding process were established, and the forming process scheme was proposed based on the wheel dressing precision and element grinding precision. At the end, the experiment for a monocrystalline silicon cylindrical mirror with size of 440mm × 50mm was carried out. The PV value of form error after grinding was about 2.7μm, which proved the correctness of the transfer function and the forming process scheme of monocrystalline silicon cylindrical optical element.
UR - http://www.scopus.com/inward/record.url?scp=85173618419&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/2591/1/012005
DO - 10.1088/1742-6596/2591/1/012005
M3 - 会议文章
AN - SCOPUS:85173618419
SN - 1742-6588
VL - 2591
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012005
T2 - 6th International Conference on Mechanical, Electric, and Industrial Engineering, MEIE 2023
Y2 - 23 May 2023 through 25 May 2023
ER -