Thermodynamic study on codeposition of ZrC-SiC from MTS-ZrCl 4-CH 4-H 2

Q. M. Liu; L. T. Zhang; J. Liu; Y. G. Wang

doi:10.1134/S0020168510100110

Thermodynamic study on codeposition of ZrC-SiC from MTS-ZrCl ₄-CH ₄-H ₂

Q. M. Liu, L. T. Zhang, J. Liu, Y. G. Wang

School of Materials Sience and Engineering

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

Thermodynamic equilibrium condensed phases for chemical vapor deposition of ZrC-SiC from the MTS-ZrCl ₄-CH ₄-H ₂ system were calculated by FactSage programs based on Gibbs free energy minimization of the reaction system. The deposition phase diagrams, which indicated the condense phases, were constructed according to the calculation results. The effects of temperature and partial pressure of precursors on the final condensed phases were studied. The results indicate that the codeposition is more effective in the presence of an independent carbon source, CH ₄, with a reasonable partial pressure than in the absence of CH ₄. The experimental results are in good agreement with the thermodynamic calculation results.

Original language	English
Pages (from-to)	1090-1095
Number of pages	6
Journal	Inorganic Materials
Volume	46
Issue number	10
DOIs	https://doi.org/10.1134/S0020168510100110
State	Published - Oct 2010

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@article{443d8a7f63bc4c7aa693e64632a5b992,

title = "Thermodynamic study on codeposition of ZrC-SiC from MTS-ZrCl 4-CH 4-H 2 ",

abstract = "Thermodynamic equilibrium condensed phases for chemical vapor deposition of ZrC-SiC from the MTS-ZrCl 4-CH 4-H 2 system were calculated by FactSage programs based on Gibbs free energy minimization of the reaction system. The deposition phase diagrams, which indicated the condense phases, were constructed according to the calculation results. The effects of temperature and partial pressure of precursors on the final condensed phases were studied. The results indicate that the codeposition is more effective in the presence of an independent carbon source, CH 4, with a reasonable partial pressure than in the absence of CH 4. The experimental results are in good agreement with the thermodynamic calculation results.",

author = "Liu, {Q. M.} and Zhang, {L. T.} and J. Liu and Wang, {Y. G.}",

year = "2010",

month = oct,

doi = "10.1134/S0020168510100110",

language = "英语",

volume = "46",

pages = "1090--1095",

journal = "Inorganic Materials",

issn = "0020-1685",

publisher = "Pleiades Publishing",

number = "10",

}

TY - JOUR

T1 - Thermodynamic study on codeposition of ZrC-SiC from MTS-ZrCl 4-CH 4-H 2

AU - Liu, Q. M.

AU - Zhang, L. T.

AU - Liu, J.

AU - Wang, Y. G.

PY - 2010/10

Y1 - 2010/10

N2 - Thermodynamic equilibrium condensed phases for chemical vapor deposition of ZrC-SiC from the MTS-ZrCl 4-CH 4-H 2 system were calculated by FactSage programs based on Gibbs free energy minimization of the reaction system. The deposition phase diagrams, which indicated the condense phases, were constructed according to the calculation results. The effects of temperature and partial pressure of precursors on the final condensed phases were studied. The results indicate that the codeposition is more effective in the presence of an independent carbon source, CH 4, with a reasonable partial pressure than in the absence of CH 4. The experimental results are in good agreement with the thermodynamic calculation results.

AB - Thermodynamic equilibrium condensed phases for chemical vapor deposition of ZrC-SiC from the MTS-ZrCl 4-CH 4-H 2 system were calculated by FactSage programs based on Gibbs free energy minimization of the reaction system. The deposition phase diagrams, which indicated the condense phases, were constructed according to the calculation results. The effects of temperature and partial pressure of precursors on the final condensed phases were studied. The results indicate that the codeposition is more effective in the presence of an independent carbon source, CH 4, with a reasonable partial pressure than in the absence of CH 4. The experimental results are in good agreement with the thermodynamic calculation results.

UR - http://www.scopus.com/inward/record.url?scp=78049343619&partnerID=8YFLogxK

U2 - 10.1134/S0020168510100110

DO - 10.1134/S0020168510100110

M3 - 文章

AN - SCOPUS:78049343619

SN - 0020-1685

VL - 46

SP - 1090

EP - 1095

JO - Inorganic Materials

JF - Inorganic Materials

IS - 10

ER -

Thermodynamic study on codeposition of ZrC-SiC from MTS-ZrCl ₄-CH ₄-H ₂

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