Thermal stability of iridium coating prepared by MOCVD

Wenbin Yang; Litong Zhang; Yunfeng Hua; Laifei Cheng

doi:10.1016/j.ijrmhm.2008.02.001

Thermal stability of iridium coating prepared by MOCVD

Wenbin Yang, Litong Zhang, Yunfeng Hua, Laifei Cheng

School of Materials Sience and Engineering

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

36 Scopus citations

Abstract

A multilayer Ir coating with equiaxed grains was prepared using metalorganic chemical vapor deposition on Nb substrates by thermal decomposition of Ir(acac)₃ precursor. Thermal stability of the coating was investigated at 1200 °C and 1300 °C in Ar. The Ir coating exhibited different thermal stabilities depending on heating temperatures. After heat treatment, the prepared nanometer and sub-micrometer grains grow obviously and grain size increased with rising heating temperature. Pores diffused outward and their amount reduced. After heat treatment, the coating gradually transformed into a compact layer. Nb diffused into Ir coating during heat treatment, and solid solutions were formed at 1300 °C.

Original language	English
Pages (from-to)	33-36
Number of pages	4
Journal	International Journal of Refractory Metals and Hard Materials
Volume	27
Issue number	1
DOIs	https://doi.org/10.1016/j.ijrmhm.2008.02.001
State	Published - Jan 2009

Keywords

Diffusion
Ir coating
MOCVD
Multilayer structure
Nb
Thermal stability

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10.1016/j.ijrmhm.2008.02.001

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title = "Thermal stability of iridium coating prepared by MOCVD",

abstract = "A multilayer Ir coating with equiaxed grains was prepared using metalorganic chemical vapor deposition on Nb substrates by thermal decomposition of Ir(acac)3 precursor. Thermal stability of the coating was investigated at 1200 °C and 1300 °C in Ar. The Ir coating exhibited different thermal stabilities depending on heating temperatures. After heat treatment, the prepared nanometer and sub-micrometer grains grow obviously and grain size increased with rising heating temperature. Pores diffused outward and their amount reduced. After heat treatment, the coating gradually transformed into a compact layer. Nb diffused into Ir coating during heat treatment, and solid solutions were formed at 1300 °C.",

keywords = "Diffusion, Ir coating, MOCVD, Multilayer structure, Nb, Thermal stability",

author = "Wenbin Yang and Litong Zhang and Yunfeng Hua and Laifei Cheng",

year = "2009",

month = jan,

doi = "10.1016/j.ijrmhm.2008.02.001",

language = "英语",

volume = "27",

pages = "33--36",

journal = "International Journal of Refractory Metals and Hard Materials",

issn = "0263-4368",

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TY - JOUR

T1 - Thermal stability of iridium coating prepared by MOCVD

AU - Yang, Wenbin

AU - Zhang, Litong

AU - Hua, Yunfeng

AU - Cheng, Laifei

PY - 2009/1

Y1 - 2009/1

N2 - A multilayer Ir coating with equiaxed grains was prepared using metalorganic chemical vapor deposition on Nb substrates by thermal decomposition of Ir(acac)3 precursor. Thermal stability of the coating was investigated at 1200 °C and 1300 °C in Ar. The Ir coating exhibited different thermal stabilities depending on heating temperatures. After heat treatment, the prepared nanometer and sub-micrometer grains grow obviously and grain size increased with rising heating temperature. Pores diffused outward and their amount reduced. After heat treatment, the coating gradually transformed into a compact layer. Nb diffused into Ir coating during heat treatment, and solid solutions were formed at 1300 °C.

AB - A multilayer Ir coating with equiaxed grains was prepared using metalorganic chemical vapor deposition on Nb substrates by thermal decomposition of Ir(acac)3 precursor. Thermal stability of the coating was investigated at 1200 °C and 1300 °C in Ar. The Ir coating exhibited different thermal stabilities depending on heating temperatures. After heat treatment, the prepared nanometer and sub-micrometer grains grow obviously and grain size increased with rising heating temperature. Pores diffused outward and their amount reduced. After heat treatment, the coating gradually transformed into a compact layer. Nb diffused into Ir coating during heat treatment, and solid solutions were formed at 1300 °C.

KW - Diffusion

KW - Ir coating

KW - MOCVD

KW - Multilayer structure

KW - Nb

KW - Thermal stability

UR - http://www.scopus.com/inward/record.url?scp=53549130237&partnerID=8YFLogxK

U2 - 10.1016/j.ijrmhm.2008.02.001

DO - 10.1016/j.ijrmhm.2008.02.001

M3 - 文章

AN - SCOPUS:53549130237

SN - 0263-4368

VL - 27

SP - 33

EP - 36

JO - International Journal of Refractory Metals and Hard Materials

JF - International Journal of Refractory Metals and Hard Materials

IS - 1

ER -

Thermal stability of iridium coating prepared by MOCVD

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Keywords

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