TY - JOUR
T1 - Thermal and mechanical limitations to processing resolution in volume non-diffractive ultrafast laser structuring
AU - Zhang, Guodong
AU - Stoian, Razvan
AU - Lou, Rui
AU - Chen, Tianqu
AU - Li, Guangying
AU - Wang, Xu
AU - Pan, Yan
AU - Wu, Pengfei
AU - Wang, Jiang
AU - Cheng, Guanghua
N1 - Publisher Copyright:
© 2021
PY - 2021/12/30
Y1 - 2021/12/30
N2 - The minimum feature size and spatial resolution are key factors for ultrafast laser structuring, defining the resulting function of the structured material. With the aim to improve the processing resolution achievable for non-diffractive beams, we analyze in volume the hydrodynamic and thermomechanical material responses during laser structuring defining the affected zone. The extent of laser induced cavitation on a 100 nm scale, accompanied by local annealing, and internal fracture under stress on µm scale are revealed using a combination ion beam milling, chemical etching and electron microscopy. Melting and mechanical stress acting at different planes are proved to be primary factors for restricting the structuring resolution to a critical distance where cooperative effects appear. Their extent is controllable via the local intensity and, hence, the pulse duration. A parametric control on the accumulated energy density limiting the thermomechanical action range and maximizing resolution is then reported.
AB - The minimum feature size and spatial resolution are key factors for ultrafast laser structuring, defining the resulting function of the structured material. With the aim to improve the processing resolution achievable for non-diffractive beams, we analyze in volume the hydrodynamic and thermomechanical material responses during laser structuring defining the affected zone. The extent of laser induced cavitation on a 100 nm scale, accompanied by local annealing, and internal fracture under stress on µm scale are revealed using a combination ion beam milling, chemical etching and electron microscopy. Melting and mechanical stress acting at different planes are proved to be primary factors for restricting the structuring resolution to a critical distance where cooperative effects appear. Their extent is controllable via the local intensity and, hence, the pulse duration. A parametric control on the accumulated energy density limiting the thermomechanical action range and maximizing resolution is then reported.
KW - Laser-matter interaction processes
KW - Surface and internal nanostructures
KW - Thermodynamics
KW - Ultrafast laser processing
UR - http://www.scopus.com/inward/record.url?scp=85114423533&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2021.151170
DO - 10.1016/j.apsusc.2021.151170
M3 - 文章
AN - SCOPUS:85114423533
SN - 0169-4332
VL - 570
JO - Applied Surface Science
JF - Applied Surface Science
M1 - 151170
ER -