TY - GEN
T1 - The temperature drift suppression of mode-localized resonant sensors
AU - Zhong, Jiming
AU - Yang, Jing
AU - Chang, Honglong
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/4/24
Y1 - 2018/4/24
N2 - This paper for the first time experimentally demonstrates the temperature drift suppression in the linear measurement range of mode-localized resonant sensors. Based on a mode-localized stiffness sensor, within a temperature range of [290, 350] K with a step of 10 K, the maximum measurement error of the amplitude ratios readout is only 8.9%, while that of frequency shift is 1137%. And the shift of the scale factor of amplitude ratios is only ∼11.6% whereas that of the frequency readout is ∼61.6%, which verifies that mode-localized sensors own an excellent capability of temperature drift suppression.
AB - This paper for the first time experimentally demonstrates the temperature drift suppression in the linear measurement range of mode-localized resonant sensors. Based on a mode-localized stiffness sensor, within a temperature range of [290, 350] K with a step of 10 K, the maximum measurement error of the amplitude ratios readout is only 8.9%, while that of frequency shift is 1137%. And the shift of the scale factor of amplitude ratios is only ∼11.6% whereas that of the frequency readout is ∼61.6%, which verifies that mode-localized sensors own an excellent capability of temperature drift suppression.
UR - http://www.scopus.com/inward/record.url?scp=85044876896&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2018.8346590
DO - 10.1109/MEMSYS.2018.8346590
M3 - 会议稿件
AN - SCOPUS:85044876896
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 467
EP - 470
BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Y2 - 21 January 2018 through 25 January 2018
ER -