The structural design and analysis of a MEMS acoustic vector sensor with high directivity

Zhenya Liu, Weizheng Yuan, Jinjun Deng, Sen Ren, Chengyu Ma

Research output: Contribution to journalArticlepeer-review

Abstract

A MEMS acoustic vector sensor with high directivity was designed. The structure employed SOG technique to increase fluid gap and decrease vibration damping, and the ANSYS software was used to analyze the influence of the fluid gap on the directivity. The high directivity of the structure has been verified. The result of simulating calculation showed that when the fluid gap changed from 5 μm to 30 μm, the amplitude increased to about 30 times, and the phase difference increased by 126° maximally; when the variable quantity of the incident angle was 80°, the phase difference increased to 40°, and the directivity and the sensitivity were enhanced evidently. The design was conducive to the development of the acoustic vector sensor.

Original languageEnglish
Pages (from-to)890-893
Number of pages4
JournalYadian Yu Shengguang/Piezoelectrics and Acoustooptics
Volume34
Issue number6
StatePublished - Dec 2012

Keywords

  • Acoustic vector sensor
  • Fluid gap
  • High directivity
  • MEMS
  • Phase difference

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