The Effects of Hemisphere Dome Orientation on the Structure of Diamond-like Carbon Film Prepared Using Ion Beam Assisted Deposition

Peng Shang; Yuanfei Ma; Zhenyun Zhang; Peng Sun; Huasong Liu; Hongchun Shi; Quan Lin; Tao Xue; Yiqin Ji

doi:10.3390/ma16051773

The Effects of Hemisphere Dome Orientation on the Structure of Diamond-like Carbon Film Prepared Using Ion Beam Assisted Deposition

Peng Shang, Yuanfei Ma, Zhenyun Zhang, Peng Sun, Huasong Liu, Hongchun Shi, Quan Lin, Tao Xue, Yiqin Ji

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Diamond-like carbon (DLC) has attracted significant attention in the recent decades because of its unique properties and applications. Ion beam assisted deposition (IBAD) has been widely established in industry due to the advantages of easy handling and scalability. In this work, a hemisphere dome model is specially designed as a substrate. The influence of the surface orientation on the coating thickness, Raman I_D/I_G ratio, surface roughness and the stress of the DLC films are examined. The reduction in the stress in the DLC films reflects the lower energy-dependence in diamond due to the varied sp3/sp2 fraction and columnar growth pattern. The variation of the surface orientation provides an efficient means of tailoring the properties and microstructure of the DLC films.

Original language	English
Article number	1773
Journal	Materials
Volume	16
Issue number	5
DOIs	https://doi.org/10.3390/ma16051773
State	Published - Mar 2023
Externally published	Yes

Keywords

diamond-like carbon
DLC film
hemisphere dome
ion beam assisted deposition
surface orientation

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10.3390/ma16051773

Cite this

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title = "The Effects of Hemisphere Dome Orientation on the Structure of Diamond-like Carbon Film Prepared Using Ion Beam Assisted Deposition",

abstract = "Diamond-like carbon (DLC) has attracted significant attention in the recent decades because of its unique properties and applications. Ion beam assisted deposition (IBAD) has been widely established in industry due to the advantages of easy handling and scalability. In this work, a hemisphere dome model is specially designed as a substrate. The influence of the surface orientation on the coating thickness, Raman ID/IG ratio, surface roughness and the stress of the DLC films are examined. The reduction in the stress in the DLC films reflects the lower energy-dependence in diamond due to the varied sp3/sp2 fraction and columnar growth pattern. The variation of the surface orientation provides an efficient means of tailoring the properties and microstructure of the DLC films.",

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AU - Shang, Peng

AU - Ma, Yuanfei

AU - Zhang, Zhenyun

AU - Sun, Peng

AU - Liu, Huasong

AU - Shi, Hongchun

AU - Lin, Quan

AU - Xue, Tao

AU - Ji, Yiqin

PY - 2023/3

Y1 - 2023/3

N2 - Diamond-like carbon (DLC) has attracted significant attention in the recent decades because of its unique properties and applications. Ion beam assisted deposition (IBAD) has been widely established in industry due to the advantages of easy handling and scalability. In this work, a hemisphere dome model is specially designed as a substrate. The influence of the surface orientation on the coating thickness, Raman ID/IG ratio, surface roughness and the stress of the DLC films are examined. The reduction in the stress in the DLC films reflects the lower energy-dependence in diamond due to the varied sp3/sp2 fraction and columnar growth pattern. The variation of the surface orientation provides an efficient means of tailoring the properties and microstructure of the DLC films.

AB - Diamond-like carbon (DLC) has attracted significant attention in the recent decades because of its unique properties and applications. Ion beam assisted deposition (IBAD) has been widely established in industry due to the advantages of easy handling and scalability. In this work, a hemisphere dome model is specially designed as a substrate. The influence of the surface orientation on the coating thickness, Raman ID/IG ratio, surface roughness and the stress of the DLC films are examined. The reduction in the stress in the DLC films reflects the lower energy-dependence in diamond due to the varied sp3/sp2 fraction and columnar growth pattern. The variation of the surface orientation provides an efficient means of tailoring the properties and microstructure of the DLC films.

KW - diamond-like carbon

KW - DLC film

KW - hemisphere dome

KW - ion beam assisted deposition

KW - surface orientation

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DO - 10.3390/ma16051773

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The Effects of Hemisphere Dome Orientation on the Structure of Diamond-like Carbon Film Prepared Using Ion Beam Assisted Deposition

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Keywords

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