The Effects of Hemisphere Dome Orientation on the Structure of Diamond-like Carbon Film Prepared Using Ion Beam Assisted Deposition

Peng Shang, Yuanfei Ma, Zhenyun Zhang, Peng Sun, Huasong Liu, Hongchun Shi, Quan Lin, Tao Xue, Yiqin Ji

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

Diamond-like carbon (DLC) has attracted significant attention in the recent decades because of its unique properties and applications. Ion beam assisted deposition (IBAD) has been widely established in industry due to the advantages of easy handling and scalability. In this work, a hemisphere dome model is specially designed as a substrate. The influence of the surface orientation on the coating thickness, Raman ID/IG ratio, surface roughness and the stress of the DLC films are examined. The reduction in the stress in the DLC films reflects the lower energy-dependence in diamond due to the varied sp3/sp2 fraction and columnar growth pattern. The variation of the surface orientation provides an efficient means of tailoring the properties and microstructure of the DLC films.

Original languageEnglish
Article number1773
JournalMaterials
Volume16
Issue number5
DOIs
StatePublished - Mar 2023
Externally publishedYes

Keywords

  • diamond-like carbon
  • DLC film
  • hemisphere dome
  • ion beam assisted deposition
  • surface orientation

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