Testing and analysing of 256×256 MOS resistor array for IR scene projector

Kai Zhang, Bin Ma, Yong Huang, Li Sun, Jie Yan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

The CMOS composite film microbridge-structured resistor array is mainly used for chip design and machining; to our knowledge, there is no detailed report on the analysis of its thermo-electric characteristics and the testing of its performance. Therefore, the paper presented the structure of the chip of the resistor array developed by using semiconductor polycrystalline silicon as its main materials,the microelectronic machining (MEMS) and the anisotropic etching. It also discussed the thermal resistance, thermal conduction, transient response characteristics and emissivity of the composite film microbridge that affect the major performance of a resistor array. Finally it tested its major performances; the test results are in agreement with the thermo-electric characteristics analysis results and show that: (1) the effectiveness of pixels of the 256×256 resistor array reaches over 99.9% and its medium-wave infrared (MWIR) apparent temperature is from 27 to 310°C; (2) with respect to the response characteristics of the resistor array, the time for radiation increase is 4 ms and its time for radiation decrease is 1.6 ms; (3) its high frame rate reaches 200 Hz and its spectral radiation waveband is 2 to 14 μm. The test results verify the correctness and effectiveness of the thermoelectric model and show that the composite film microbridge is suitable for highly dynamic electric to thermal conversion and provides an analysis method and test data for studying the thermoelectric characteristics of a microbridge-structured resistor array, thus having some engineering application values.

Original languageEnglish
Title of host publication15th International Conference on Advanced Communication Technology
Subtitle of host publicationSmart Services with Internet of Things!, ICACT 2013 - Proceeding
Pages143-147
Number of pages5
StatePublished - 2013
Event15th International Conference on Advanced Communication Technology: Smart Services with Internet of Things!, ICACT 2013 - PyeongChang, Korea, Republic of
Duration: 27 Jan 201330 Jan 2013

Publication series

NameInternational Conference on Advanced Communication Technology, ICACT
ISSN (Print)1738-9445

Conference

Conference15th International Conference on Advanced Communication Technology: Smart Services with Internet of Things!, ICACT 2013
Country/TerritoryKorea, Republic of
CityPyeongChang
Period27/01/1330/01/13

Keywords

  • CMOS resistor array
  • equivalent blackbody temperature
  • infrared scene simulation
  • micro-radiator
  • thermoelectric characteristic

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