Synthesis of Si/C/N nanocomposite powder by laser induced gas phase reaction

Zhengwei Pan, Hualun Li, Litong Zhang

Research output: Contribution to journalArticlepeer-review

Abstract

The Si/C/N nanocomposite powder was synthesized by irradiating a mixture of HMDS (hexamethyldisilazane) and NH3 with a high power CO2 laser. The influences of HMDS flow rate and NH3 on the powder composition were studied. The results show that increasing HMDS flow rate can decrease the carbon content, increase the hydrogen content, and keep the silicon and nitrogen content constant. The addition of NH3 can greatly decrease the carbon content, and increase the nitrogen content.

Original languageEnglish
Pages (from-to)35-39
Number of pages5
JournalFuhe Cailiao Xuebao/Acta Materiae Compositae Sinica
Volume14
Issue number2
StatePublished - May 1997

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