Study on short pulse width XeCl laser

Ren Ren; Chang Le Chen; Jin Xu; Xiao Yuan; Ke Xin Jin; Yong Cang Wang; Zhou Mo Song; Bing Bo Wei

Study on short pulse width XeCl laser

Ren Ren, Chang Le Chen, Jin Xu, Xiao Yuan, Ke Xin Jin, Yong Cang Wang, Zhou Mo Song, Bing Bo Wei

School of Physical Science and Technology

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

A high pressure, short pulse duration XeCl laser was fabricated, and laser parameters were measured. Aiming at large volume and high gas pressure, the laser system adopted the ultraviolet preionization to produce glow discharge. The result was that the nano-second (ns) discharge pumped 308 nm excimer laser was realized in proportion of HCl:Xe:He = 0.1%:1%:98.9% with the output pulse energy of 530 mJ and the minimal pulse duration of 13 ns. The rectangle facula is 2 cm × l cm, the beam divergence is 3 mrad, and the maximal repetition frequency is 5 Hz.

Original language	English
Pages (from-to)	1036-1040
Number of pages	5
Journal	Zhongguo Jiguang/Chinese Journal of Lasers
Volume	31
Issue number	9
State	Published - Sep 2004

Keywords

Excimer laser
Glow discharge
Laser technique
Nanosecond discharge
Preionization

Cite this

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title = "Study on short pulse width XeCl laser",

abstract = "A high pressure, short pulse duration XeCl laser was fabricated, and laser parameters were measured. Aiming at large volume and high gas pressure, the laser system adopted the ultraviolet preionization to produce glow discharge. The result was that the nano-second (ns) discharge pumped 308 nm excimer laser was realized in proportion of HCl:Xe:He = 0.1%:1%:98.9% with the output pulse energy of 530 mJ and the minimal pulse duration of 13 ns. The rectangle facula is 2 cm × l cm, the beam divergence is 3 mrad, and the maximal repetition frequency is 5 Hz.",

keywords = "Excimer laser, Glow discharge, Laser technique, Nanosecond discharge, Preionization",

author = "Ren Ren and Chen, {Chang Le} and Jin Xu and Xiao Yuan and Jin, {Ke Xin} and Wang, {Yong Cang} and Song, {Zhou Mo} and Wei, {Bing Bo}",

year = "2004",

month = sep,

language = "英语",

volume = "31",

pages = "1036--1040",

journal = "Zhongguo Jiguang/Chinese Journal of Lasers",

issn = "0258-7025",

publisher = "Science Press ",

number = "9",

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TY - JOUR

T1 - Study on short pulse width XeCl laser

AU - Ren, Ren

AU - Chen, Chang Le

AU - Xu, Jin

AU - Yuan, Xiao

AU - Jin, Ke Xin

AU - Wang, Yong Cang

AU - Song, Zhou Mo

AU - Wei, Bing Bo

PY - 2004/9

Y1 - 2004/9

N2 - A high pressure, short pulse duration XeCl laser was fabricated, and laser parameters were measured. Aiming at large volume and high gas pressure, the laser system adopted the ultraviolet preionization to produce glow discharge. The result was that the nano-second (ns) discharge pumped 308 nm excimer laser was realized in proportion of HCl:Xe:He = 0.1%:1%:98.9% with the output pulse energy of 530 mJ and the minimal pulse duration of 13 ns. The rectangle facula is 2 cm × l cm, the beam divergence is 3 mrad, and the maximal repetition frequency is 5 Hz.

AB - A high pressure, short pulse duration XeCl laser was fabricated, and laser parameters were measured. Aiming at large volume and high gas pressure, the laser system adopted the ultraviolet preionization to produce glow discharge. The result was that the nano-second (ns) discharge pumped 308 nm excimer laser was realized in proportion of HCl:Xe:He = 0.1%:1%:98.9% with the output pulse energy of 530 mJ and the minimal pulse duration of 13 ns. The rectangle facula is 2 cm × l cm, the beam divergence is 3 mrad, and the maximal repetition frequency is 5 Hz.

KW - Excimer laser

KW - Glow discharge

KW - Laser technique

KW - Nanosecond discharge

KW - Preionization

UR - http://www.scopus.com/inward/record.url?scp=10044265559&partnerID=8YFLogxK

M3 - 文章

AN - SCOPUS:10044265559

SN - 0258-7025

VL - 31

SP - 1036

EP - 1040

JO - Zhongguo Jiguang/Chinese Journal of Lasers

JF - Zhongguo Jiguang/Chinese Journal of Lasers

IS - 9

ER -

Study on short pulse width XeCl laser

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Keywords

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