Structure control of thin films via droplet charge in aerosol-assisted vapor deposition process

Xianghui Hou, Kwang Leong Choy

Research output: Contribution to conferencePaperpeer-review

Abstract

Electrostatic Spray Assisted Vapor Deposition (ESAVD) and Electrostatic Assisted Aerosol Jet Deposition (EAAJD) are variants of chemical vapour deposition process. This paper reports for the first time the effect of aerosol droplet charge density on the growth of thin films produced by ESAVD and EAAJD methods. These include the deposition of binary (e.g. ZnS), and ternary (e.g. CuInS2) sulphide films using ESAVD and EAAJD methods, respectively. The experimental results indicate that the charge density of aerosol droplets has a strong influence on the composition, crystallinity and morphology of ESAVD and EAAJD produced films. This fundamental study is essential for the precise structural control of thin films during deposition. Furthermore, it has been shown that films with preferred growth orientation can be achieved with appropriate control of charged droplet condition. The possible deposition mechanism involved is also presented.

Original languageEnglish
Pages214-220
Number of pages7
StatePublished - 2005
Externally publishedYes
Event15th European Conference on Chemical Vapor Deposition, EUROCVD-15 - Bochum, Germany
Duration: 5 Sep 20059 Sep 2005

Conference

Conference15th European Conference on Chemical Vapor Deposition, EUROCVD-15
Country/TerritoryGermany
CityBochum
Period5/09/059/09/05

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