Structural parameters optimization of piezoelectric micro synthetic jet actuators

The orthogonal method and multiple-domain coupling numerical simulation are used to explore the influence of structural parameters on piezoelectric micro synthetic jet velocity. As a precondition the orifice thickness, chamber height and diaphragm thickness are predefined for the sake of micromachining economy. The results show that the orifice width, chamber width and PbZr_xTi_1-xO₃ (PZT) thickness affect the jet velocity seriously. In the range of the test, the jet velocity decreases with increasing orifice width and PZT thickness, or with decreasing chamber width. The PZT width has the least influence on the jet velocity. The research is valuable for structural design optimization of piezoelectric micro synthetic jet actuators. Finally, piezoelectric micro synthetic jet actuators are fabricated with Si micromachining technology based on the above study. Peak jet velocity of 10 m/s is obtained with 30 V and 10 kHz AC electric drive.