Abstract
The iridium coatings were deposited on both ceramic quartz and metal niobium substrates by metal-organic chemical vapor deposition (MOCVD) of tris-acetylacetonate. The relation between precursor sublimation temperature and the coating microstructure was investigated. XRD analysis shows that the iridium coatings are pure polycrystalline phase. SEM photographs show that the iridium films consist of two films of different structure due to the modified of the precursor sublimation temperature. The higher sublimation temperature (220°C) bring films composed of chaotically oriented close-spaced spherical crystals of about dozens of nanometer and lower sublimation temperature (185°C) bring ideally dense and compact coatings, which are defects free. These coatings have attractive properties to be used as oxidation barriers at high temperature.
| Original language | English |
|---|---|
| Pages (from-to) | 488-491 |
| Number of pages | 4 |
| Journal | Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering |
| Volume | 35 |
| Issue number | 3 |
| State | Published - Mar 2006 |
Keywords
- Iridium coatings
- MOCVD
- Microstructure
- Sublimation temperature
- Substrates