Simulation and application of spherical tool influence function for magnetorheological finishing

Hong Xiang Wang, Shi Wei Liu, Qing Hua Zhang, Jing Hou, Xian Hua Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Magnetorheological finishing (MRF) has been widely used in the field of modern optical machining due to the high certainty of processing. In the processing of spherical components, the detection means and sample preparation limit the acquisition of magnetorheological spherical tool influence function. In order to realize the high precision manufacturing of spherical components, the spherical removal function in the magneto-rheological polishing process is simulated and applied in practice. Based on the Preston equation, the material removal of the planar component was analyzed and the plane tool influence function model was established. On this basis, the correlation between spherical removal and plane removal was analyzed, and a simplified spherical tool influence function simulation method was proposed, and its accuracy was verified by experiments. Aiming at the processing of spherical components, the processing technology was improved and the actual processing was carried out. After processing, the PV value of the transmitted wavefront was 0.09λ, and the RMS value was 3.2 nm. The experimental results show that the spherical tool influence function simulated in this paper can be applied in actual processing and obtain a high-quality optical surface.

Original languageEnglish
Title of host publication10th International Symposium on Advanced Optical Manufacturing and Testing Technologies
Subtitle of host publicationAdvanced Optical Manufacturing and Metrology Technologies
EditorsMingbo Pu, John H. Marsh, Bin Fan, Yifan Dai, Xiong Li, Xiangang Luo
PublisherSPIE
ISBN (Electronic)9781510650176
DOIs
StatePublished - 2021
Externally publishedYes
Event10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies 2021 - Chengdu, China
Duration: 14 Jun 202117 Jun 2021

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12071
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies 2021
Country/TerritoryChina
CityChengdu
Period14/06/2117/06/21

Keywords

  • Astigmatism
  • Bicubic spline
  • Blended lenticular lens
  • High myopia
  • High-order polynomial
  • Reduce thickness

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