@inproceedings{93b319fd99744444b60f9c89b535c887,
title = "Short-coherence in-line phase-shifting infrared digital holographic microscopy for measurement of internal structure in silicon",
abstract = "Short-coherence in-line phase-shifting digital holographic microscopy based on Michelson interferometer is proposed to measure internal structure in silicon. In the configuration, a short-coherence infrared laser is used as the light source in order to avoid the interference formed by the reference wave and the reflected wave from the front surface of specimen. At the same time, in-line phase-shifting configuration is introduced to overcome the problem of poor resolution and large pixel size of the infrared camera and improve the space bandwidth product of the system. A specimen with staircase structure is measured by using the proposed configuration and the 3D shape distribution are given to verify the effectiveness and accuracy of the method.",
keywords = "Digital holographic microscopy, infrared imaging, phase-shifting technique, silicon",
author = "Teli Xi and Jiazhen Dou and Jianglei Di and Ying Li and Jiwei Zhang and Chaojie Ma and Jianlin Zhao",
note = "Publisher Copyright: {\textcopyright} 2017 SPIE.; 5th International Conference on Optical and Photonics Engineering ; Conference date: 04-04-2017 Through 07-04-2017",
year = "2017",
doi = "10.1117/12.2270654",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Asundi, {Anand Krishna}",
booktitle = "Fifth International Conference on Optical and Photonics Engineering",
}