Sensing with Serial or Parallel Micromechanical Resonators

Honglong Chang

doi:10.1109/Transducers50396.2021.9495645

Sensing with Serial or Parallel Micromechanical Resonators

Honglong Chang

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

The mass-spring-damper resonator is the basic mechanical component of current microelectromechanical systems (MEMS) sensors. It is implemented in different forms such as beams, diaphragms, rings, etc. The amplitude, frequency, or phase change of the resonator is typically used to perform sensing applications. This paper presents the basic theories, challenges, and applications for serial and parallel connections of micromechanical resonators for high-accuracy sensing. It provides a new solution to improve the accuracy of MEMS sensors based on current MEMS process capabilities.

Original language	English
Title of host publication	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	606-608
Number of pages	3
ISBN (Electronic)	9781665412674
DOIs	https://doi.org/10.1109/Transducers50396.2021.9495645
State	Published - 20 Jun 2021
Event	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States Duration: 20 Jun 2021 → 25 Jun 2021

Publication series

Name	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/Territory	United States
City	Virtual, Online
Period	20/06/21 → 25/06/21

Keywords

amplitude ratio
Mode-localized sensors
optimal filtering
virtual accelerometer
virtual gyroscope

Access to Document

10.1109/Transducers50396.2021.9495645

Cite this

Chang, H. (2021). Sensing with Serial or Parallel Micromechanical Resonators. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 (pp. 606-608). (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/Transducers50396.2021.9495645

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title = "Sensing with Serial or Parallel Micromechanical Resonators",

abstract = "The mass-spring-damper resonator is the basic mechanical component of current microelectromechanical systems (MEMS) sensors. It is implemented in different forms such as beams, diaphragms, rings, etc. The amplitude, frequency, or phase change of the resonator is typically used to perform sensing applications. This paper presents the basic theories, challenges, and applications for serial and parallel connections of micromechanical resonators for high-accuracy sensing. It provides a new solution to improve the accuracy of MEMS sensors based on current MEMS process capabilities.",

keywords = "amplitude ratio, Mode-localized sensors, optimal filtering, virtual accelerometer, virtual gyroscope",

author = "Honglong Chang",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 ; Conference date: 20-06-2021 Through 25-06-2021",

year = "2021",

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doi = "10.1109/Transducers50396.2021.9495645",

language = "英语",

series = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",

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Chang, H 2021, Sensing with Serial or Parallel Micromechanical Resonators. in 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Institute of Electrical and Electronics Engineers Inc., pp. 606-608, 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Virtual, Online, United States, 20/06/21. https://doi.org/10.1109/Transducers50396.2021.9495645

Sensing with Serial or Parallel Micromechanical Resonators. / Chang, Honglong.
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 606-608 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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PY - 2021/6/20

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N2 - The mass-spring-damper resonator is the basic mechanical component of current microelectromechanical systems (MEMS) sensors. It is implemented in different forms such as beams, diaphragms, rings, etc. The amplitude, frequency, or phase change of the resonator is typically used to perform sensing applications. This paper presents the basic theories, challenges, and applications for serial and parallel connections of micromechanical resonators for high-accuracy sensing. It provides a new solution to improve the accuracy of MEMS sensors based on current MEMS process capabilities.

AB - The mass-spring-damper resonator is the basic mechanical component of current microelectromechanical systems (MEMS) sensors. It is implemented in different forms such as beams, diaphragms, rings, etc. The amplitude, frequency, or phase change of the resonator is typically used to perform sensing applications. This paper presents the basic theories, challenges, and applications for serial and parallel connections of micromechanical resonators for high-accuracy sensing. It provides a new solution to improve the accuracy of MEMS sensors based on current MEMS process capabilities.

KW - amplitude ratio

KW - Mode-localized sensors

KW - optimal filtering

KW - virtual accelerometer

KW - virtual gyroscope

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M3 - 会议稿件

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BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Y2 - 20 June 2021 through 25 June 2021

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Chang H. Sensing with Serial or Parallel Micromechanical Resonators. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 606-608. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). doi: 10.1109/Transducers50396.2021.9495645

Sensing with Serial or Parallel Micromechanical Resonators

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