@inproceedings{c40223842e454d0b9020ad16eb75aeb3,
title = "Self-Oscillating Calorimeter Based on Thermal-Piezoresistive Resonator",
abstract = "For the first time, this paper demonstrates a resonant calorimeter based on thermal actuation - piezoresistive detection resonators, employing physical self-oscillation and achieving a high-quality (Q) factor. By supplying a direct constant (DC) voltage Vdc, the N-type silicon resonator oscillates at its natural frequency. The output signal in the form of an alternating voltage (AC) and is transduced by two piezoresistive nano-beams. The resonant frequency is found to be a linear function of the thermal perturbation generated by an on-chip micro-heater. With a specific value of Vdc, a bias instability as low as 11 ppb and a power resolution of 690 nW is achieved in ambient conditions.",
keywords = "Calorimeter, Resolution, Self-oscillation, Thermal-piezoresistive",
author = "Aojie Quan and Hemin Zhang and Chengxin Li and Chen Wang and Xinyu Wu and Michael Kraft",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "英语",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1770--1773",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
}